International

Electrotechnical

Area		Piezoelectric, dielectric and electrostatic devices and associated materials for frequency control, selection and detection / Materials for Surface Acoustic Wave (SAW) devices

IEV ref		561-07-36

en		thickness variation for five points TV5
		difference between the maximum thickness and the minimum thickness at the centre and four peripheral points of the wafer as shown in Figure 1 Figure 1 – Wafer sketch and measurement points

fr		variation d’épaisseur pour cinq points, f TV5, f
		différence entre l’épaisseur maximale et l’épaisseur minimale au centre et en quatre points périphériques de la plaquette, comme indiqué Figure 1 Figure 1 – Croquis de plaquette et points de mesure

ar		تباين السمك لخمس نقاط

de		Schwankung der Dicke an fünf Punkten, f TV5

es		variación de espesor para cinco puntos

it		variazione dello spessore per cinque punti TV5

ko		5점 두께 변화

ja		TV5

pl		zmienność grubości dla pięciu punktów, f TV5

pt		variação de espessura para cinco pontos

zh		五点厚度偏差 TV5

Publication date: 2021-08