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IEVref:561-07-11ID:
Language:enStatus: Proof
Term: fixed quality area
Synonym1: FQA
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Definition: central area of a wafer surface, defined by a nominal edge exclusion, X, over which the specified values of a parameter apply

Note 1 to entry: The nominal edge exclusion, X, is usually 5 mm as shown in Figure 1.

Figure 1 – Wafer sketch and measurement points


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Replaces:561-07-11:2014-11
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