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IEVref:523-02-04ID:
Language:enStatus: Standard
Term: stiction
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Definition: phenomenon in which a moving structure is stuck to another structure or substrate by adhesion forces

Note 1 to entry: When structures become smaller, stiction appears significant owing to the scale effect, meaning that surface forces predominate over body forces. Stiction frequently occurs in the MEMS fabrication process when small structures are released during wet etching processes owing to the surface tension of liquid. Representative adhesion forces that cause stiction are van der Waals force, electrostatic force, and surface tension of liquid between structures.


Publication date:2018-12
Source:IEC 62047-1:2016, 2.2.7
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