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IEVref:523-05-06ID:
Language:enStatus: Standard
Term: LIGA process
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Definition: process for creating a microstructure that can be used as a mould by using deep lithography, based on X-rays followed by electroforming

Noteá1 to entry: LIGA is an acronym for Lithographie, Galvanoformung und Abformung, the German for lithography, electroforming, and moulding. Characteristics of the LIGA process include the ability to mass-produce high aspect-ratio microstructures with a line width of 1 Ám to 10 Ám and a height of several hundreds of micrometres, to allow the use of a wide range of materials including plastics, metals, and ceramics, and to be combined with silicon semiconductor elements, etc.


Publication date:2018-12
Source:IEC 62047-1:2016, 2.5.13, modified – The definition has been rewritten.
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