IEVref:841-31-13ID:
Language:enStatus: Standard
Term: microwave plasma
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition: thermal plasma in which ionization is obtained by resistance and microwave heating due to a microwave electromagnetic field


Publication date:2004-09
Source
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5: