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IEVref:523-04-06ID:
Language:enStatus: Standard
Term: microcantilever
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Definition: cantilever produced by micromachining

Note 1 to entry: Microcantilevers are often used in high-resolution microscopes such as the atomic force microscope (AFM).


Publication date:2018-12
Source:IEC 62047-1:2016, 2.4.17
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