(Untitled) (Untitled)(Untitled) (Untitled)(Untitled) (Untitled)(Untitled) (Untitled)(Untitled)Examples




IEVref:523-05-10ID:
Language:enStatus: Standard
Term: etch stop
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition: deposition of a very low etch-rate layer at a controlled depth that effectively terminates the etching process

Note 1 to entry: An etch stop is sometimes used as the termination layer of the etching process. There are two basic types of etch stop that are used in micromachining: dopant etch stop and electrochemical etch stop.


Publication date:2018-12
Source:IEC 62047-1:2016, 2.5.25, modified – The definition has been rewritten.
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5: