IEVref:841-34-10ID:
Language:enStatus: Standard
Term: plasma assisted physical vapour deposition treatment
Synonym1: PAPVD (abbreviation)
[Preferred]
Synonym2:
Synonym3:
Symbol:
Definition: PVD treatment assisted by an abnormal glow-discharge for activating ionization processes of vapours and gases and sputtering substrates of compounds being deposited on basis material


Publication date:2004-09
Source
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5: