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IEVref: | 841-34-10 | | ID: |
Language: | en | | Status: Standard |
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Term: | plasma assisted physical vapour deposition treatment
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Synonym1: | PAPVD (abbreviation)
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Definition: | PVD treatment assisted by an abnormal glow-discharge for activating ionization processes of vapours and gases and sputtering substrates of compounds being deposited on basis material
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Publication date: | 2004-09 |
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