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IEVref:523-05-09ID:
Language:enStatus: Standard
Term: anisotropic etching
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Definition: etching process in which the etching rate differs depending on the crystallographic orientation or direction of the energy beams

Note 1 to entry: A typical anisotropic etchant for silicon is potassium hydroxide (KOH). It is widely used in various bulk micromachining.


Publication date:2018-12
Source:IEC 62047-1:2016, 2.5.24
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