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IEVref:561-07-20ID:
Language:enStatus: Standard
Term: orientation flat
Synonym1: OF
[Preferred]
Synonym2: primary flat
[Admitted]
Synonym3:
Symbol:
Definition: flat portion of wafer perimeter indicating the crystal orientation

Figure 25 – Wafer indication and measurement points for the thickness variation for five points

Note 1 to entry: Generally, the orientation flat corresponds to the SAW propagation direction.


Publication date:2014-11
Source:
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Internal notes:2016-02-22: Figures replaced by newly generated smaller versions. JGO
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