(Untitled) (Untitled)(Untitled) (Untitled)(Untitled) (Untitled)(Untitled) (Untitled)(Untitled)Examples




IEVref:523-04-12ID:
Language:enStatus: Standard
Term: comb-drive actuator
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition: electrostatic actuator, consisting of a series of parallel fingers, fixed in position, engaged and interleaved with a second, movable set of fingers

Note 1 to entry: The application of an electrostatic charge to the first set of fingers attracts the fingers of the second set, such that they become more fully engaged in the interdigit spaces of the first set. Then the static charge is removed and drained, and the second set of fingers is returned to its home position by micromachined spring tension.


Publication date:2018-12
Source:IEC 62047-1:2016, 2.4.8
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5: