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IEVref:523-04-25ID:
Language:enStatus: Standard
Term: CMOS MEMS
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Definition: integrated MEMS device, in which complementary metal-oxide-semiconductor (CMOS) signal-processing circuits and MEMS elements are formed on the same silicon substrate

Note 1 to entry: CMOS MEMS is one form of the MEMS device that integrates CMOS signal-processing circuits and MEMS elements. Usually, the CMOS MEMS is fabricated by performing a MEMS process on the CMOS preformed wafer, and therefore it is necessary that the MEMS process does not damage the CMOS circuit.


Publication date:2018-12
Source:IEC 62047-1:2016, 2.4.26
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