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IEVref:523-05-04ID:
Language:enStatus: Standard
Term: surface micromachining
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Definition: micromachining that forms various substances in various microshapes on the substrate's surface

Note 1 to entry: Surface micromachining is a processing technique that applies for example chemical vapour deposition (CVD) to form various thin films on the substrate and uses a mask to perform selective removal of the substrate surface to produce movable parts and other structures. The dissolved layer that was deposited initially is called the sacrificial layer. A typical sacrificial layer material is phosphosilicate glass (PSG). This technology is applied to the fabrication of micro-beams, bearings, and links, etc.


Publication date:2018-12
Source:IEC 62047-1:2016, 2.5.6
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