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IEVref:561-07-36ID:
Language:enStatus: Standard
Term: thickness variation for five points
Synonym1: TV5
[Preferred]
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Definition: measure of wafer thickness variation, defined as the maximum difference between five thickness measurements

Note 1 to entry: Thickness is measured at the centre of the wafer and at four peripheral points as shown in Figure 25.

Figure 25 – Wafer indication and measurement points for the thickness variation for five points


Publication date:2014-11
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Internal notes:2016-02-22: Figures replaced by newly generated smaller versions. JGO
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