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IEVref:523-04-17ID:
Language:enStatus: Standard
Term: microvalve
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Definition: mechanical device that controls the flow of fluid in a microscopic channel

Note 1 to entry: Microvalves, which are composed of such components as actuators and diaphragms, made of silicon, etc., control the flow in microscopic channels (narrower than several micrometres). For example, a gas flow control valve is composed of a stacked piezoelectric actuator and a diaphragm. To control high-viscosity fluids such as blood, it is necessary to enlarge the channel and increase the stroke of the valve drive. A mechanism using a shape-memory alloy coil and a bias spring has been developed experimentally for this purpose, as well as a mechanism that alters the channel by an electrostatic, magnetic, or piezoelectric actuator.


Publication date:2018-12
Source:IEC 62047-1:2016, 2.4.25
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