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IEVref:561-07-27ID:
Language:enStatus: Standard
Term: reference plane
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Definition: plane used as a reference for spatial measurements

Note 1 to entry: The reference plane may be one of the following types:

  1. for clamped measurements, the flat chuck surface that contacts the back surface of the wafer;
  2. three points at specified locations on the front surface within the fixed quality area;
  3. the least-squares fit to the front surface using all measured points within the fixed quality area;
  4. the least-squares fit to the front surface using all measured points within one site.



Publication date:2014-11
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