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IEVref:561-07-03ID:
Language:enStatus: Standard
Term: bevel
Synonym1: edge profile
[Admitted]
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Definition: slope or rounding of the wafer perimeter

Note 1 to entry: The process of creating a bevel is called “bevelling” or “edge rounding”.

Note 2 to entry: The bevel and its tolerances should be specified by the supplier.


Publication date:2014-11
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