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IEVref:523-05-18ID:
Language:enStatus: Standard
Term: nanoimprint
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Definition: moulding process to replicate nanometre-scale structures

Note 1 to entry: Nanoimprint is classified into two types according to the difference in moulding method. Thermoplastic nanoimprint utilizes temperature and pressure controls with thermoplastic materials. Photo nanoimprint utilizes light irradiation with photo-curable materials. The hot-embossing process, a conventional technique, is a similar fabrication process to the thermoplastic nanoimprint. In some cases, hot-embossing and nanoimprint are distinguished through the moulding processes to form bulk-film materials and thin-film materials on a substrate, respectively.


Publication date:2018-12
Source:IEC 62047-1:2016, 2.5.37
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