IEVref:523-05-18ID:
Language:enStatus: Standard
Term: nanoimprint
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition: moulding process to replicate nanometre-scale structures

Note 1 to entry: Nanoimprint is classified into two types according to the difference in moulding method. Thermoplastic nanoimprint utilizes temperature and pressure controls with thermoplastic materials. Photo nanoimprint utilizes light irradiation with photo-curable materials. The hot-embossing process, a conventional technique, is a similar fabrication process to the thermoplastic nanoimprint. In some cases, hot-embossing and nanoimprint are distinguished through the moulding processes to form bulk-film materials and thin-film materials on a substrate, respectively.


Publication date:2018-12
SourceIEC 62047-1:2016, 2.5.37
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5: