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IEVref:523-05-13ID:
Language:enStatus: Standard
Term: deep reactive ion etching
Synonym1: DRIE
[Preferred]
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Definition: variation of reactive ion etching (RIE), which can produce high aspect-ratio structures with vertical sidewalls

Note 1 to entry: For example, high aspect-ratio structures can be produced by introducing alternately an etching gas and a protective-film-forming gas in reactive ion etching equipment.

Note 2 to entry: This note applies to the French language only.


Publication date:2018-12
Source:IEC 62047-1:2016, 2.5.29
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