(Untitled) (Untitled)(Untitled) (Untitled)(Untitled) (Untitled)(Untitled) (Untitled)(Untitled)Examples




IEVref:523-04-05ID:
Language:enStatus: Standard
Term: diaphragm structure
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition: flexible membrane structure that separates space

Note 1 to entry: In a microscopic region, materials such as single-crystal silicon, polysilicon, and so on are used for the diaphragm structure. The structure is commonly fabricated by anisotropic etching. The thickness of the structure can be controlled from several micrometres to several tens of micrometres depending on the application. The structure can be used to detect pressure changes, or to cause displacement. For example, it is used in the pressure-sensitive part of a pressure sensor for automobile engines and silicon microphones. Also, it is used as a membrane to change pressure in microvalves and micropumps.


Publication date:2018-12
Source:IEC 62047-1:2016, 2.4.16
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5: