|Definition:|| flexible membrane structure that separates space
Note 1 to entry: In a microscopic region, materials such as single-crystal silicon, polysilicon, and so on are used for the diaphragm structure. The structure is commonly fabricated by anisotropic etching. The thickness of the structure can be controlled from several micrometres to several tens of micrometres depending on the application. The structure can be used to detect pressure changes, or to cause displacement. For example, it is used in the pressure-sensitive part of a pressure sensor for automobile engines and silicon microphones. Also, it is used as a membrane to change pressure in microvalves and micropumps.