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IEVref: | 841-22-07 | | ID: |
Language: | en | | Status: Standard |
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Term: | chemical vapour deposition
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Synonym1: | CVD (abbreviation)
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Definition: | process in which vapours and gases react chemically to produce deposits at the surface of a substrate
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Publication date: | 2004-09 |
Source | 731-22-53 MOD |
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