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IEVref:815-14-12ID:
Language:enStatus: Standard
Term: chemical vapour deposition process
Synonym1: CVD process
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Definition: production process of a film by involving chemical reactions of gases (vapours) which include the desired constituent atoms

Note 1 to entry: Organometallic or other compounds are transported at relatively low temperature to the reaction area using a carrier gas where the products of the reaction are deposited on a substrate (e.g. MOCVD, halide CVD, plasma enhanced CVD, laser enhanced CVD).


Publication date:2015-11
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