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IEVref:523-07-04ID:
Language:enStatus: Standard
Term: aspect ratio, <MEMS>
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Definition: ratio of the vertical dimension (height) to the horizontal dimension (width) of a three-dimensional structure, used as an index of the relative thickness of the structure

Note 1 to entry: It is accepted that the silicon process is not appropriate to form three-dimensional structures of much depth, because it is difficult to manufacture structures having an aspect ratio over 10. By the use of anisotropic etching or the LIGA process, deep holes, grooves and so on having an aspect ratio of 100 or greater can be obtained.


Publication date:2019-10
Source:IEC 62047-1:2016, 2.7.6
Replaces:523-07-04:2018-12
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