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IEVref:523-05-03ID:
Language:enStatus: Standard
Term: bulk micromachining
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Definition: micromachining that removes a part of the substrate

Note 1 to entry: An example of bulk micromachining is a processing method based on etching by a chemical solution to remove unnecessary parts of a substrate. Covering the areas to be preserved with a mask of SiO2 or Si3N4 ensures that etching cannot progress below the surface. Also, a boron-doped layer can stop the etching of the part below the surface layer. Recently, silicon fusion bonding has been used to fabricate still more complex structures.


Publication date:2018-12
Source:IEC 62047-1:2016, 2.5.5
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