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IEVref:561-07-29ID:
Language:enStatus: Standard
Term: secondary flat
Synonym1: SF
[Preferred]
Synonym2: sub-orientation flat
[Preferred]
Synonym3:
Symbol:
Definition: flat portion of wafer perimeter shorter than the orientation flat

Figure 25 – Wafer indication and measurement points for the thickness variation for five points

Note 1 to entry: When present, the secondary flat indicates wafer polarity and can serve to distinguish different wafer cuts.


Publication date:2014-11
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Internal notes:2016-02-22: Figures replaced by newly generated smaller versions. JGO
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