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IEVref:523-04-02ID:
Language:enStatus: Standard
Term: integrated microprobe
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Definition: one-piece probe combining a microprobe and a signal processing circuit

Note 1 to entry: The smaller the sensitive part of the sensor, 1) the less interference with the measuring object, 2) the higher the signal-to-noise ratio in the measurement, and 3) the more small-area local data can be obtained. An integrated microprobe is a device consisting of a microprobe prepared by micromachining silicon to an ultra-microscopic needle and incorporating a signal processing circuit. Integrated microprobes, made by machining silicon needles to a diameter of from several nanometres to several micrometres and combining them with an impedance conversion circuit, etc., are in actual use as microscopic electrodes for organisms, scanning tunnelling microscopes (STMs), and atomic force microscopes (AFMs).


Publication date:2018-12
Source:IEC 62047-1:2016, 2.4.12
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