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| IEVref: | 841-22-08 | | ID: |
| Language: | en | | Status: Standard |
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| Term: | physical vapour deposition process
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| Synonym1: | PVD (abbreviation)
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| Definition: | process of producing thin films mainly by using physical evaporation and then deposition
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| Publication date: | 2004-09 |
| Source | 815-05-13 MOD |
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