IEVref:523-04-25ID:
Language:enStatus: Standard
Term: CMOS MEMS
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition: integrated MEMS device, in which complementary metal-oxide-semiconductor (CMOS) signal-processing circuits and MEMS elements are formed on the same silicon substrate

Note 1 to entry: CMOS MEMS is one form of the MEMS device that integrates CMOS signal-processing circuits and MEMS elements. Usually, the CMOS MEMS is fabricated by performing a MEMS process on the CMOS preformed wafer, and therefore it is necessary that the MEMS process does not damage the CMOS circuit.


Publication date:2018-12
SourceIEC 62047-1:2016, 2.4.26
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5: