IEVref:
561-07-06
ID:
Language:
en
Status:
Standard
Term:
contamination
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition:
foreign matter on the surface of a wafer which cannot be removed after cleaning
Publication
date
:
2014-11
Source
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5:
foreign matter on the surface of a wafer which cannot be removed after cleaning