Definition: | ratio of the vertical dimension (height) to the horizontal dimension (width) of a three-dimensional structure, used as an index of the relative thickness of the structure
Note 1 to entry: It is accepted that the silicon process is not appropriate to form three-dimensional structures of much depth, because it is difficult to manufacture structures having an aspect ratio over 10:1. By the use of anisotropic etching or the LIGA process, deep holes, grooves and so on having an aspect ratio of 100:1 or greater can be obtained.
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