IEVref:523-07-04ID:
Language:enStatus: Obsolete
Term: aspect ratio, <micro-electromechanical devices>
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition: ratio of the vertical dimension (height) to the horizontal dimension (width) of a three-dimensional structure, used as an index of the relative thickness of the structure

Note 1 to entry: It is accepted that the silicon process is not appropriate to form three-dimensional structures of much depth, because it is difficult to manufacture structures having an aspect ratio over 10:1. By the use of anisotropic etching or the LIGA process, deep holes, grooves and so on having an aspect ratio of 100:1 or greater can be obtained.


Publication date:2018-12
SourceIEC 62047-1:2016, 2.7.6
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5: