IEVref:
841-34-07
ID:
Language:
en
Status:
Standard
Term:
heating in constant voltage plasma
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition:
heating in plasma diffusive treatment or PACVD method with activation of glow discharge by means of constant voltage
Publication
date
:
2004-09
Source
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5:
heating in plasma diffusive treatment or PACVD method with activation of glow discharge by means of constant voltage